Design by analysis of a MEMS pressure sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4931, Issue , 2002, Pages 81-86

  Pryputniewicz, Ryszard J ^a   Furlong, Cosme ^a   Pryputniewicz, Emily J ^b  

^a WORCESTER POLYTECHNIC INSTITUTE   (United States)

^b INSTITUTE FOR DEFENSE ANALYSES   (United States)

Author keywords

Design by analysis; Differential pressure; Hybrid methodology; MEMS; Pressure sensor; Uncertainty analysis

Indexed keywords

COMPUTER SIMULATION; DEFORMATION; FINITE ELEMENT METHOD; INTERFEROMETRY; OPTICAL MICROSCOPY; PIEZOELECTRIC DEVICES; POLYSILICON; PRESSURE MEASUREMENT; SENSORS; STRAIN;

DESIGN BY ANALYSIS; DIFFERENTIAL PRESSURE; MICROELECTROMECHANICAL PRESSURE SENSOR; OPTOELECTRONIC LASER INTERFEROMETRIC MICROSCOPY;

MICROELECTROMECHANICAL DEVICES;

EID: 0036450141     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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