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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 126-135

Parametric yield optimization of MEMS

(3) Delauche, Flavien a,b Affour, Bachar a,b Dufaza, Christian a,b,c

a Egypt (France)

b LWMM (CNRS) (France)

c LIRMM (France)

Author keywords

Design of Experiments; MEMS resonator; Parametric yield management; Statistical optimization; Thick Copper Post Inductors

Indexed keywords

ALGORITHMS; INDUCTANCE; INTEGRATED CIRCUIT MANUFACTURE; OPTICAL SWITCHES; OPTIMIZATION; RESONATORS; STATISTICAL METHODS;

STATISTICAL OPTIMIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 6444244390 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.462802 Document Type: Article

Times cited : (2)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.