Resonant frequency method for monitoring MEMS fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 220-228

  Tanner, Danelle M ^a   Owen Jr , Albert C ^b   Rodriguez, Fredd ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF COLORADO   (United States)

^c NONE

Author keywords

Comb drive resonator; Monitoring tool; Parametric testing tool; Resonant frequency measurement

Indexed keywords

ELECTROSTATICS; MICROMACHINING; NATURAL FREQUENCIES; PHOTOLITHOGRAPHY; RESONATORS; THIN FILMS;

COMB-DRIVE RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037721313     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478201     Document Type: Conference Paper

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