High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms

Journal of Modern Optics

Volumn 43, Issue 4, 1996, Pages 701-708

  Sandoz, Patrick ^a   Tribillon, Gilbert ^a   Perrin, Hervé ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALCULATIONS; INTERFEROMETERS; LEVEL MEASUREMENT; LIGHT INTERFERENCE; PHASE MEASUREMENT; PHASE SHIFT; ROUGHNESS MEASUREMENT; SPECTROSCOPY;

HEIGHT MEASUREMENT; HIGH RESOLUTION PROFILOMETRY; OPTICAL PATH DIFFERENCES; OPTICAL SPECTRAL ANALYSIS; PHASE CALCULATION ALGORITHMS; SURFACE PROFILE; WHITE LIGHT INTERFEROGRAMS;

INTERFEROMETRY;

EID: 0030126002     PISSN: 09500340     EISSN: 13623044     Source Type: Journal    
DOI: 10.1080/09500349608232777     Document Type: Article

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