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Volumn 37, Issue 19, 1998, Pages 4137-4142

Common-path optical heterodyne profilometer: A configuration

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EID: 18844434364 PISSN: 1559128X EISSN: 21553165 Source Type: Journal
DOI: 10.1364/AO.37.004137 Document Type: Article

Times cited : (43)

References (13)

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