Testing of rod objects by grazing incidence interferometry: Theory

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 15, Issue 11, 1998, Pages 2921-2928

  Dresel, Thomas ^a   Brinkmann, Sven ^a   Schreiner, Roland ^a   Schwider, Johannes ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001511519     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.15.002921     Document Type: Article

References (10)

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2. N. Abramson, “The interferoscope: a new type of interferometer with variable fringe separation,” Optik 30, 56–71 (1969).
3. K. G. Birch and F. J. Green, “Oblique incidence interferometry applied to non-optical surfaces,” J. Phys. E 6, 1045–1048 (1973).
4. J. Schwider, “Verfahren und Anordnung zur Prü fung beliebiger Mantelflächen rotationssymmetrischer Festkörper mittels synthetischer Hologramme,” German patent WP 106 769 (January 4, 1972).
5. T. Dresel, J. Schwider, A. Wehrhahn, and S. Babin, “Grazing incidence interferometry applied to the measurement of cylindrical surfaces,” Opt. Eng. 34, 3531–3535 (1995).
6. S. Brinkmann, T. Dresel, R. Schreiner, and J. Schwider, “Axicon-type test interferometer for cylindrical surfaces,” Optik 102, 106–110 (1996).
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8. S. Brinkmann, R. Schreiner, T. Dresel, and J. Schwider, “Interferometric testing of technical surfaces with computer generated holograms,” in Optical Inspection and Micromeasurements II, C. Gareki, ed. Proc. SPIE 3098, 83–89 (1997).
9. L. Denes and J. Salsbury, “Flatness, parallelism and other novel uses of grazing-incidence interferometry in precision engineering,” in Topical Conference on Microscopic Inspection of Macroscopic Structures (American Society for Precision Engineering, Raleigh, N. Car., 1995), pp. 20–23.
10. T. Dresel, M. Beyerlein, and J. Schwider, “Design and fabrication of computer-generated beam-shaping holograms,” Appl. Opt. 35, 4615–4621 (1996).