Scanning grating microinterferometer for MEMS metrology

Journal of Manufacturing Science and Engineering

Volumn 126, Issue 4, 2004, Pages 807-812

  Kim, Byungki ^a   Schmittdiel, Michael C ^a   Levent Degertekin, F ^a   Kurfess, Thomas R ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; DIFFRACTION GRATINGS; INTERFEROMETERS; MEASUREMENTS; PRODUCTIVITY; QUALITY CONTROL; SENSORS; VIBRATIONS (MECHANICAL);

MICROINTERFEROMETERS; RELIABILITY TESTING; TARGET SURFACES; TOPOGRPAHY;

MICROELECTROMECHANICAL DEVICES;

EID: 14744288914     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1812773     Document Type: Article

References (25)

1. Panetta, K., Aluru, N., Bart, S., Blanton, S., Böhringer, K., and Brown, R., 2000, "ITC 2000 Panel Discussion: Testing Challenges for MEMS," Proceedings of ITC International Test Conference, pp. 1130-1135.
2. S. D. Senturia, 2002, Microsystem Design, Kluwer Academic Publishers, Norwell.
3. Grace, R., 2003, "Commercialization issues of MEMS/MST/ Micromachines: An Updated Industry Report Card on the Barriers to Commercialization," NSF Nanotechnology Manufacturing Workshop.
4. Teague, E. C., Scire, F. E., Baker, S. M., and Jensen, S. W., 1982, "Three-Dimensional Stylus Profilometry," Wear, 83, pp. 1-12.
5. Albrecht, T. R., Akamine, S., Carver, T. E., and Quate, C. F., 1990, "Microfabrication of Cantilever Styli for Atomic Force Microscope," J. Vac. Sci. Technol. A, 8, pp. 3386-3396.
6. Manalis, S. R., Minne, S. C., Atalar, A., and Quate, C. F., 1996, "Interdigital Cantilevers for Atomic Force Microscopy," Appl. Phys. Lett., 69, pp. 3944-3946.
7. Gordon, S. K., and Timothy, R. C., 1989, "Confocal Scanning Optical Microscopy," Phys. Today, pp. 9 55-62.
8. Migot, J., and Gorecki, C., 1983, "Measurement of Surface Roughness: Comparison Between a Defect-of-Focus Optical Technique and the Classical Stylus Technique," Wear, 87, pp. 39-49.
9. Piyawattanametha, W., Patterson, P. R., Su, G. D. J., Toshiyoshi, H., and Wu, M. C., 2001, "A MEMS Noninterferometric Differential Confocal Scanning Optical Microscope," Transducer, Munich, Germany, 10-14 June.
10. Cornille, N., Garcia, D., Sutton, M. A., McNeill, S., Orteu, J. J., "Automated 3D Reconstruction Using a Scanning Electron Microscope," SEM Conference on Experimental and Applied Mechanics, Charlotte, North Carolina, 2-4 June 2003.
11. Hill, M., O'Mahony, C., Berney, H., Hughes, P. J., Hynes, E., and Lane, W. A., 2001, "Verification of 2-D MEMS Model Using Optical Profiling Techniques," Opt. Lasers Eng., 36, pp. 169-183.
12. Hart, M. R., Conant, R. A., Lau, K. Y., and Muller, R. S., 2000, "Stroboscopic Interferometer System for Dynamic MEMS Characterization, " J. Microelectromech. Syst., 9, pp. 409-418.
13. Rembe, C., and Muller, R. S., 2002, "Measurement System for Full Three-Dimensional Motion Characterization of MEMS," J. Microelectromech. Syst., 11(5), pp. 479-488.
14. Novak, E., Wan, D., Unruh, P., and Schmit, J., 2003, "Dynamic MEMS Measurement Using a Strobed Interferometric System with Combined Coherence Sensing and Phase Information," Proceedings of Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly, pp. 104-107.
15. Rawton, R. A. et al., 1999, "MEMS Characterization Using Scanning Laser Vibrometer," Proc. SPIE Symposium Microelectronic Manufacturing.
16. www.veeco.com
17. www.polytec.com
18. Graebner, J. E., Barber, B., Gammel, P. L., Greywall, D. S., and Gopani, S., 2001, "Dynamic Visualization of Subangstrom High-Frequency Surface Vibrations," Appl. Phys. Lett., 78, pp. 159-161.
19. Kim, B., Razavi, H. A., Degertekin, F. L., and Kurfess, T. R., 2002, "Microinterferometer for Noncontact Inspection of MEMS," The 3rd International Workshop on Microfactories, pp. 77-80.
20. Kim, B., Razavi, H. A., Degertekin, F. L., and Kurfess, T. R., 2002, "Micromachined Interferometer for Measuring Dynamic Response of Microstructures," Proceedings of ASME International Mechanical Engineering Congress and Exposition, MEMS Symposium.
21. Kim, B., Razavi, H. A., Degertekin, F. L., and Kurfess, T. R., 2003, "Micromachined Interferometer for MEMS Metrology," Proceedings of Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly, pp. 73-78.
22. Yaralioglu, G. G., Atalar, A., Manalis, S. R., and Quate, C. F., 1998, "Analysis and Design of an Interdigital Cantilever as a Displacement Sensor," J. Appl. Phys., 83(2), pp. 7405-7415.
23. Schmittdiel, M. C., 2004, Master's thesis, Georgia Institute of Technology.
24. Hall, N. A., Lee, W., and Degertekin, F. L., 2003, "Capacitive Micromachined Ultrasonic Transducers with Diffraction-based Integrated Optical Displacement Detection," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 50, pp. 1570-80.
25. Kim, B., Schmittdiel, M., Degertekin, F. L., and Kurfess, T. R., 2004, "Deformable Diffraction Grating for Scanning Micro Interferometer Arrays," Proceedings of 2004 SPIE Symposium on MOEMS Display and Imaging Systems, 5348, pp. 98-107.