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Volumn 50, Issue 1, 2001, Pages 381-384
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Grazing incidence interferometry for high precision measurements of cylindrical form deviations
a b c c |
Author keywords
Laser; Metrology; Optical
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Indexed keywords
CHARGE COUPLED DEVICES;
COMPUTER GENERATED HOLOGRAPHY;
DATA ACQUISITION;
DENSE WAVELENGTH DIVISION MULTIPLEXING;
ELECTROMAGNETIC WAVE INTERFERENCE;
ERROR ANALYSIS;
LIGHT PROPAGATION;
OPTICAL SENSORS;
OPTICAL VARIABLES MEASUREMENT;
PHASE SHIFT;
SURFACE PHENOMENA;
DIFFRACTING ELEMENTS;
GRAZING INCIDENCE INTERFEROMETERS;
HOLOGRAPHIC INTERFEROMETRY;
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EID: 0034952390
PISSN: 00078506
EISSN: None
Source Type: Journal
DOI: 10.1016/S0007-8506(07)62145-3 Document Type: Article |
Times cited : (17)
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References (4)
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