Scanning differential-heterodyne-interferometer with acousto-optic deflectors

Optics Communications

Volumn 123, Issue 1-3, 1996, Pages 34-40

  Tiziani, Hans J ^a   Maier, Nikolaus ^a   Rothe, Andreas ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Acousto optic deflectors; Heterodyne interferometer; Scanning profilometer

Indexed keywords

ACOUSTOOPTICAL DEVICES; COHERENT LIGHT; DIFFRACTION; FREQUENCY MODULATION; OPTICAL VARIABLES MEASUREMENT; PHOTODETECTORS; PROBES; SIGNAL DETECTION; SURFACE TESTING;

ACOUSTOOPTIC DEFLECTORS; HETERODYNE INTERFEROMETER; OPTICAL PROFILE MEASURING SYSTEM; SCANNING PROFILOMETER;

INTERFEROMETERS;

EID: 0029754708     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/0030-4018(95)00555-2     Document Type: Article

References (5)

1. G. Sommargren, Appl. Optics 20 (1981) 610.
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3. A. Korpel, Acousto-optics (Marcel Dekker, New York, 1988).
4. E.G.H. Lean, C.F. Quate and H.J. Shaw, Appl. Phys. Lett 10 (1967) 48.
5. H.J. Tiziani, H.J. Jordan and N. Maier, Contributions to: Optical non-contact techniques for engineering surface metrology, Publ. no. EUR 16161 of the Commission of the European Communities (1995).