Requirements for the application of speckle correlation techniques to on-line inspection of surface roughness

CIRP Annals - Manufacturing Technology

Volumn 48, Issue 1, 1999, Pages 467-470

  Goch, G ^a   Peters, J ^a   Lehmann, P ^a   Liu, H ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; FITS AND TOLERANCES; INSPECTION; LASER BEAMS; OPTICAL SENSORS; SPECKLE; STATISTICAL METHODS; SURFACE STRUCTURE; THREE DIMENSIONAL;

ONLINE INSPECTION; SPECKLE CORRELATION TECHNIQUE;

ROUGHNESS MEASUREMENT;

EID: 0032631206     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63228-4     Document Type: Article

References (15)

1. Whitehouse, D.J.; Bowen, D.K.; Venkatesh, V.C.; Lonardo, P.; Brown, C.A.: Gloss and Surface Topography. Annals of the CIRP Vol. 43/271994, pp. 541-549.
2. Miyoshi, T.; Takaya, Y.; Saito, K.: Micromachined Profile Measurement by Means of Optical Inverse Scattering Phase Method. Annals of the CIRP Vol. 45/1/1996, pp. 497-500.
3. Brodmann, R.; Gast, Th.; Thurn, G., An Optical Instrument for Measuring the Surface Roughness in Production Control. Annals of the CIRP Vol. 33/1/1984, pp. 403-406.
4. ISO 4287:1997.
5. J. A. Ogilvy, Theory of Wave Scattering from Random Rough Surfaces, Hilger, Bristol 1991.
6. P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces, Pergamon Press, Oxford 1963.
7. J. W. Goodman, Introduction to Fourier Optics, McGraw-Hill, New York 1968.
8. P. Lehmann, Untersuchungen zur Lichtstreuung an technischen Oberflächen im Hinblick auf eine prozeßgekoppelte laseroptische Rauheitsmessung, Fortschritt-Berichte VDI, Reihe 8, Nr. 463, VDI-Verlag Düsseldorf 1995.
9. A. Papoulis, Probability, Random Variables and Stochastic Processes, McGraw-Hill, New York 1965.
10. J. W. Goodman, "Statistical properties of laser speckle," in Laser Speckle and Related Phenomena, J. C. Dainty, ed., Vol. 9 of Springer Series in Topics in Applied Physics, Springer-Verlag, Berlin 1975.
11. J. W. Goodman, Statistical Optics, John Wiley & Sons, New York 1985.
12. G. Bitz, Verfahren zur Bestimmung von Rauheitskenngrößen durch Specklekorrelation, Fortschritt- Berichte VDI, Reihe 8, Nr. 47, VDI-Verlag Düsseldorf 1982.
13. B. Ruffing, Berührungslose Messung technischer Oberflächen mit Speckle-Korrelationsverfahren, PhD- Thesis, University of Karlsruhe/ Germany 1987.
14. ISO 4288:1996.
15. Peters, J.: Parametrisches laseroptisches Rauheits-meßsystem aus der Sicht real auftretender Oberflächentopographien. Submitted as PhD-thesis at the University of Bremen/ Germany, December 1998.