Microtopographic analysis of turned surfaces by model-based scatterometry

Precision Engineering

Volumn 26, Issue 3, 2002, Pages 306-313

  Hertzsch, A ^a   Kroger K ^a   Truckenbrodt, H ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Diffraction; Light scattering; Surface roughness; Topography; Turned surface

Indexed keywords

COMPARATORS (OPTICAL); ELECTROMAGNETIC WAVE DIFFRACTION; LIGHT SCATTERING; MACHINE VIBRATIONS; SURFACE ROUGHNESS;

MICROTOPOGRAPHIC ANALYSIS; TURNED SURFACES;

PRECISION ENGINEERING;

EID: 0036642049     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00116-2     Document Type: Article

References (20)

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