메뉴 건너뛰기




Volumn 5, Issue 4, 2005, Pages 675-682

The simulation of a new asymmetrical double-gate poly-Si TFT with modified channel conduction mechanism for highly reduced OFF-state leakage current

Author keywords

Double gate; Grain boundary; Leakage current, polysilicon; Pseudosubthreshold; Thin film transistor (TFT); Traps; Two dimensional simulation

Indexed keywords

DOUBLE GATES; GATE-INDUCED GRAIN BARRIER LOWERING (GIGBL); TRAPS; TWO-CARRIER DEVICE SIMULATION;

EID: 31044450695     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2005.860558     Document Type: Article
Times cited : (3)

References (38)
  • 2
    • 0030150105 scopus 로고    scopus 로고
    • Inverse staggered poly-Si and amorphous Si double structure TFTs for LCD panels with peripheral driver circuit integration
    • May
    • T. Aoyama, K. Ogawa, Y. Mochizuki, and N. Konishi, "Inverse staggered poly-Si and amorphous Si double structure TFTs for LCD panels with peripheral driver circuit integration," IEEE Trans. Electron Devices, vol. 43, no. 5, pp. 701-705, May 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , Issue.5 , pp. 701-705
    • Aoyama, T.1    Ogawa, K.2    Mochizuki, Y.3    Konishi, N.4
  • 4
    • 3142561382 scopus 로고    scopus 로고
    • Electric-field-enhanced crystallization of amorphous silicon
    • Oct.
    • J. Jang, J. Y. Oh, and S. K. Kim, "Electric-field-enhanced crystallization of amorphous silicon," Nature, vol. 395, no. 6701, pp. 481-483, Oct. 1998.
    • (1998) Nature , vol.395 , Issue.6701 , pp. 481-483
    • Jang, J.1    Oh, J.Y.2    Kim, S.K.3
  • 6
    • 0029246215 scopus 로고
    • High performance poly-Si TFT fabricated using pulsed laser annealing and remote plasma CVD with low temperature processing
    • Feb.
    • A. Kohno, T. Sameshima, N. Sano, M. Sekiya, and M. Hara, "High performance poly-Si TFT fabricated using pulsed laser annealing and remote plasma CVD with low temperature processing," IEEE Trans. Electron Devices, vol. 42, no. 2, pp. 251-257, Feb. 1995.
    • (1995) IEEE Trans. Electron Devices , vol.42 , Issue.2 , pp. 251-257
    • Kohno, A.1    Sameshima, T.2    Sano, N.3    Sekiya, M.4    Hara, M.5
  • 7
    • 0026818616 scopus 로고
    • Conduction mechanism of leakage current observed in metal-oxide-semiconductor transistors and poly-Si thin-film transistors
    • Feb.
    • M. Yazaki, S. Takenaka, and H. Oshima, "Conduction mechanism of leakage current observed in metal-oxide-semiconductor transistors and poly-Si thin-film transistors," Jpn. J. Appl. Phys., vol. 31, no. 2A, pp. 206-209, Feb. 1992.
    • (1992) Jpn. J. Appl. Phys. , vol.31 A , Issue.2 , pp. 206-209
    • Yazaki, M.1    Takenaka, S.2    Oshima, H.3
  • 8
    • 0030384711 scopus 로고    scopus 로고
    • A novel polysilicon thin-film transistor with a p-n-p structured gate electrode
    • Dec.
    • B. Min, C. Park, and M. Han, "A novel polysilicon thin-film transistor with a p-n-p structured gate electrode," IEEE Electron Device Lett., vol. 17, no. 12, pp. 560-562, Dec. 1996.
    • (1996) IEEE Electron Device Lett. , vol.17 , Issue.12 , pp. 560-562
    • Min, B.1    Park, C.2    Han, M.3
  • 9
    • 4043137371 scopus 로고    scopus 로고
    • Characteristics of high-k spacer offset-gated polisilicon TFTs
    • Aug.
    • Z. Xiong, H. Liu, C. Zhu, and J. K. O. Sin, "Characteristics of high-k spacer offset-gated polisilicon TFTs," IEEE Trans. Electron Devices, vol. 51, no. 8, pp. 1304-1308, Aug. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.8 , pp. 1304-1308
    • Xiong, Z.1    Liu, H.2    Zhu, C.3    Sin, J.K.O.4
  • 11
    • 0032309646 scopus 로고    scopus 로고
    • Kink-free polycrystalline silicon double-gate elevated-channel thin-film transistors
    • Dec.
    • K. P. A. Kumar, J. K. O. Sin, C. T. Nguyen, and P. K. Ko, "Kink-free polycrystalline silicon double-gate elevated-channel thin-film transistors," IEEE Trans. Electron Devices, vol. 45, no. 12, pp. 2514-2520, Dec. 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , Issue.12 , pp. 2514-2520
    • Kumar, K.P.A.1    Sin, J.K.O.2    Nguyen, C.T.3    Ko, P.K.4
  • 12
    • 0036565151 scopus 로고    scopus 로고
    • Implementation and characterization of self-aligned double-gate TFT with thin channel and thick source/drain
    • May
    • S. Zhang, R. Han, J. K. O. Sin, and M. Chan, "Implementation and characterization of self-aligned double-gate TFT with thin channel and thick source/drain," IEEE Trans. Electron Devices, vol. 49, no. 5, pp. 718-724, May 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.5 , pp. 718-724
    • Zhang, S.1    Han, R.2    Sin, J.K.O.3    Chan, M.4
  • 13
    • 0035447817 scopus 로고    scopus 로고
    • A new polycrystalline silicon TFT with a single grain boundary in the channel
    • Sep.
    • J.-H. Jeon, M.-C. Lee, K.-C. Park, and M.-K. Han, "A new polycrystalline silicon TFT with a single grain boundary in the channel," IEEE Electron Device Lett., vol. 22, no. 9, pp. 429-431, Sep. 2001.
    • (2001) IEEE Electron Device Lett. , vol.22 , Issue.9 , pp. 429-431
    • Jeon, J.-H.1    Lee, M.-C.2    Park, K.-C.3    Han, M.-K.4
  • 14
    • 0035120897 scopus 로고    scopus 로고
    • A proposed single-boundary thin-film transistor
    • Jan.
    • C.-H. Oh and M. Matsumura, "A proposed single-boundary thin-film transistor," IEEE Electron Device Lett., vol. 22, no. 1, pp. 20-22, Jan. 2001.
    • (2001) IEEE Electron Device Lett. , vol.22 , Issue.1 , pp. 20-22
    • Oh, C.-H.1    Matsumura, M.2
  • 15
    • 0003690029 scopus 로고    scopus 로고
    • High performance low-temperature processes polysilicon TFTs fabricated by excimer laser crystallization with recessed-channel structure
    • Tokyo, Japan
    • H.-C. Cheng, L.-J. Cheng, C.-W. Lin, Y.-L. Lu, and C.-Y. Chen, "High performance low-temperature processes polysilicon TFTs fabricated by excimer laser crystallization with recessed-channel structure," in Active Matrix Liquid Crystal Displays (AMLCD) Tech. Dig., Tokyo, Japan, 2000, p. 281.
    • (2000) Active Matrix Liquid Crystal Displays (AMLCD) Tech. Dig. , pp. 281
    • Cheng, H.-C.1    Cheng, L.-J.2    Lin, C.-W.3    Lu, Y.-L.4    Chen, C.-Y.5
  • 17
    • 0032137394 scopus 로고    scopus 로고
    • Low-temperature single-crystal Si TFTs fabricated on Si films processed via Sequential lateral solidification
    • Aug.
    • M. A. Crowder, P. G. Carey, P. M. Smith, R. S. Sposili, H. S. Cho, and J. S. Im, "Low-temperature single-crystal Si TFTs fabricated on Si films processed via Sequential lateral solidification," IEEE Electron Device Lett., vol. 19, no. 8, pp. 306-308, Aug. 1998.
    • (1998) IEEE Electron Device Lett. , vol.19 , Issue.8 , pp. 306-308
    • Crowder, M.A.1    Carey, P.G.2    Smith, P.M.3    Sposili, R.S.4    Cho, H.S.5    Im, J.S.6
  • 18
    • 0442295642 scopus 로고    scopus 로고
    • Improved off-current and subthreshold slope in aggressively scaled poly-Si TFTs with a single grain boundary in the channel
    • Feb.
    • P. M. Walker, H. Mizuta, S. Uno, Y. Furuta, and D. G. Hasko, "Improved off-current and subthreshold slope in aggressively scaled poly-Si TFTs with a single grain boundary in the channel," IEEE Trans. Electron Devices, vol. 51, no. 2, pp. 212-219, Feb. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.2 , pp. 212-219
    • Walker, P.M.1    Mizuta, H.2    Uno, S.3    Furuta, Y.4    Hasko, D.G.5
  • 21
    • 0027592564 scopus 로고
    • On the pseudo-subthreshold characteristics of polycrystalline-silicon thin-film transistors with large grain size
    • May
    • T.-S. Li and P.-S. Lin, "On the pseudo-subthreshold characteristics of polycrystalline-silicon thin-film transistors with large grain size," IEEE Electron Device Lett., vol. 14, no. 5, pp. 240-242, May 1993.
    • (1993) IEEE Electron Device Lett. , vol.14 , Issue.5 , pp. 240-242
    • Li, T.-S.1    Lin, P.-S.2
  • 22
    • 0030241288 scopus 로고    scopus 로고
    • Threshold voltage, field effect mobility, and gate-to channel capacitance in polysilicon TFTs
    • Sep.
    • M. D. Jacunski, M. S. Shur, and M. Hack, "Threshold voltage, field effect mobility, and gate-to channel capacitance in polysilicon TFTs," IEEE Trans. Electron Devices, vol. 43, no. 9, pp. 1433-1440, Sep. 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , Issue.9 , pp. 1433-1440
    • Jacunski, M.D.1    Shur, M.S.2    Hack, M.3
  • 23
    • 23344449825 scopus 로고    scopus 로고
    • A new Poly-Si Triple-Gate Thin-Film Transistor (TG-TFT) with diminished pseudo-subthreshold region: Theoretical investigation and analysis
    • Aug.
    • A. A. Orouji and M. J. Kumar, "A new Poly-Si Triple-Gate Thin-Film Transistor (TG-TFT) with diminished pseudo-subthreshold region: Theoretical investigation and analysis," IEEE Trans. Electron Devices, vol. 52, no. 8, pp. 1815-1820, Aug. 2005.
    • (2005) IEEE Trans. Electron Devices , vol.52 , Issue.8 , pp. 1815-1820
    • Orouji, A.A.1    Kumar, M.J.2
  • 24
    • 1942485694 scopus 로고    scopus 로고
    • Technology Modeling Associates, Palo Alto, CA
    • MEDICI 4.0, Technology Modeling Associates, Palo Alto, CA, 1997.
    • (1997) MEDICI 4.0
  • 25
    • 0009509593 scopus 로고
    • Carrier mobilities in silicon empirically related to doping and field
    • Dec.
    • D. M. Caughey and R. E. Thomas, "Carrier mobilities in silicon empirically related to doping and field," Proc. IEEE, vol. 55, no. 12, pp. 2192-2193, Dec. 1967.
    • (1967) Proc. IEEE , vol.55 , Issue.12 , pp. 2192-2193
    • Caughey, D.M.1    Thomas, R.E.2
  • 26
    • 0346935141 scopus 로고    scopus 로고
    • Statistical study of subthreshold characteristics in polycrystalline silicon thin-film transistors
    • Dec.
    • Y. Kitahara, S. Takagi, and N. Sano, "Statistical study of subthreshold characteristics in polycrystalline silicon thin-film transistors," J. Appl. Phys., vol. 94, no. 12, pp. 7789-7795, Dec. 2003.
    • (2003) J. Appl. Phys. , vol.94 , Issue.12 , pp. 7789-7795
    • Kitahara, Y.1    Takagi, S.2    Sano, N.3
  • 28
    • 5344267571 scopus 로고
    • Pixel design of TFT-LCD's for high quality images
    • Boston, MA
    • K. Suzuki, "Pixel design of TFT-LCD's for high quality images, " in Society Information Display (SID) Symp. Dig., Boston, MA, 1992, pp. 39-42.
    • (1992) Society Information Display (SID) Symp. Dig. , pp. 39-42
    • Suzuki, K.1
  • 29
    • 0016597193 scopus 로고
    • The electrical properties of polycrystalline silicon films
    • Dec.
    • J. Y. W. Seto, "The electrical properties of polycrystalline silicon films," J. Appl. Phys., vol. 46, no. 12, pp. 5247-5254, Dec. 1975.
    • (1975) J. Appl. Phys. , vol.46 , Issue.12 , pp. 5247-5254
    • Seto, J.Y.W.1
  • 30
    • 0018032498 scopus 로고
    • Transport properties of polycrystalline silicon films
    • Nov.
    • G. Baccarani, B. Ricco, and G. Spadini, "Transport properties of polycrystalline silicon films," J. Appl. Phys., vol. 49, no. 11, pp. 5565-5570, Nov. 1978.
    • (1978) J. Appl. Phys. , vol.49 , Issue.11 , pp. 5565-5570
    • Baccarani, G.1    Ricco, B.2    Spadini, G.3
  • 32
    • 0028545015 scopus 로고
    • Scaling-parameter-dependent model for subthreshold swing S in double-gate SOI MOSFETs
    • Nov.
    • Y. Tosaka, K. Suzuki, and T. Sugii, "Scaling-parameter-dependent model for subthreshold swing S in double-gate SOI MOSFETs," IEEE Electron Device Lett., vol. 15, no. 11, pp. 466-468, Nov. 1994.
    • (1994) IEEE Electron Device Lett. , vol.15 , Issue.11 , pp. 466-468
    • Tosaka, Y.1    Suzuki, K.2    Sugii, T.3
  • 33
    • 0035056539 scopus 로고    scopus 로고
    • Device simulation of grain boundaries in lightly doped polysilicon films and analysis of dependence on defect density
    • Jan.
    • M. Kimura, S. Inoue, T. Shimoda, and T. Sameshima, "Device simulation of grain boundaries in lightly doped polysilicon films and analysis of dependence on defect density," Jpn. J. Appl. Phys., vol. 40, no. 1, pp. 49-53, Jan. 2001.
    • (2001) Jpn. J. Appl. Phys. , vol.40 , Issue.1 , pp. 49-53
    • Kimura, M.1    Inoue, S.2    Shimoda, T.3    Sameshima, T.4
  • 34
    • 0020089602 scopus 로고
    • Conductivity behavior in polycrystalline semiconductor thin film transistors
    • Feb.
    • J. Levinson, F. R. Shepherd, P. J. Scanlon, W. D. Westwood, G. Este, and M. Rider, "Conductivity behavior in polycrystalline semiconductor thin film transistors," J. Appl. Phys., vol. 53, no. 2, pp. 1193-1202, Feb. 1982.
    • (1982) J. Appl. Phys. , vol.53 , Issue.2 , pp. 1193-1202
    • Levinson, J.1    Shepherd, F.R.2    Scanlon, P.J.3    Westwood, W.D.4    Este, G.5    Rider, M.6
  • 35
    • 1942423745 scopus 로고    scopus 로고
    • Two-dimensional analytical modeling of fully depleted DMG SOI MOSFET and evidence for diminished SCEs
    • Apr.
    • M. J. Kumar and A. Chaudhry, "Two-dimensional analytical modeling of fully depleted DMG SOI MOSFET and evidence for diminished SCEs," IEEE Trans. Electron Devices, vol. 51, no. 4, pp. 569-574, Apr. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.4 , pp. 569-574
    • Kumar, M.J.1    Chaudhry, A.2
  • 36
    • 4444274252 scopus 로고    scopus 로고
    • Investigation of the novel attributes of a fully depleted dual-material gate SOI MOSFET
    • Sep.
    • A. Chaudhry and M. J. Kumar, "Investigation of the novel attributes of a fully depleted dual-material gate SOI MOSFET," IEEE Trans. Electron Devices, vol. 51, no. 9, pp. 1463-1467, Sep. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.9 , pp. 1463-1467
    • Chaudhry, A.1    Kumar, M.J.2
  • 37
    • 2342583496 scopus 로고    scopus 로고
    • Controlling short-channel effects in deep submicron SOI MOSFETs for improved reliability: A review
    • Mar.
    • _, "Controlling short-channel effects in deep submicron SOI MOSFETs for improved reliability: A review," IEEE Trans. Device Mater. Rel., vol. 4, no. 1, pp. 99-109, Mar. 2004.
    • (2004) IEEE Trans. Device Mater. Rel. , vol.4 , Issue.1 , pp. 99-109
  • 38
    • 15844418329 scopus 로고    scopus 로고
    • A new Dual-Material Double-Gate (DMDG) nanoscale SOI MOSFET - Two-dimensional analytical modeling and simulation
    • Mar.
    • G. V. Reddy and M. J. Kumar, "A new Dual-Material Double-Gate (DMDG) nanoscale SOI MOSFET - Two-dimensional analytical modeling and simulation," IEEE Trans. Nanotechnol., vol. 4, no. 2, pp. 260-268, Mar. 2005.
    • (2005) IEEE Trans. Nanotechnol. , vol.4 , Issue.2 , pp. 260-268
    • Reddy, G.V.1    Kumar, M.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.