Inverse staggered poly-Si and amorphous Si double structure TFT's for LCD panels with peripheral driver circuits integration

IEEE Transactions on Electron Devices

Volumn 43, Issue 5, 1996, Pages 701-705

  Aoyama, Takashi ^a   Ogawa, Kazuhiro ^a   Mochizuki, Yasuhiro ^a   Konishi, Nobutake ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; HYDROGENATION; LENSES; LIQUID CRYSTAL DISPLAYS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING GLASS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR LASERS; SUBSTRATES;

CONVEX LENS; FLY EYE LENS INTEGRATOR; LASER ANNEALING; LASER EMISSION TUBE; PERIPHERAL DRIVER CIRCUIT; PLASMA CHEMICAL VAPOR DEPOSITION;

THIN FILM TRANSISTORS;

EID: 0030150105     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.491245     Document Type: Article

References (14)

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