Influence of deposition parameters on surface roughness and mechanical properties of boron carbon nitride coatings synthesized by ion beam assisted deposition

Thin Solid Films

Volumn 497, Issue 1-2, 2006, Pages 210-217

  Zhou, Fei ^a   Adachi, Koshi ^b   Kato, Koji ^b  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Boron carbon nitride coatings; Friction coefficient; Nanohardness; Roughness

Indexed keywords

BORON COMPOUNDS; FRICTION; HARDNESS; MECHANICAL PROPERTIES; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL);

BORON CARBON NITRIDE COATINGS; FRICTION COEFFICIENT; NANOHARDNESS;

DEPOSITION;

EID: 30344471229     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.10.070     Document Type: Article

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