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Surface and Coatings Technology

Volumn 128-129, Issue 1, 2000, Pages 334-340

Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering

(6) Zhou, Z F a Bello, I a Lei, M K a Li, K Y a Lee, C S a Lee, S T a

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

Boron nitride; Carbon; Magnetron sputtering; Microfriction; Nano indentation; Thin films

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SPUTTER DEPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL); TRIBOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

BORON CARBON NITRIDE; MICRO-SCRATCHING; NANOINDENTATION; RADIOFREQUENCY MAGNETRON SPUTTERING; SCANNING AUGER ELECTRON MICROSCOPY;

NITRIDES;

EID: 0033721634 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00600-9 Document Type: Article

Times cited : (112)

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