Phase separation in magnetron sputtered superhard BCN thin films

Diamond and Related Materials

Volumn 7, Issue 6, 1998, Pages 839-844

  Ulrich, S ^a   Ehrhardt, H ^b   Theel, T ^b   Schwan, J ^b   Westermeyr, S ^c   Scheib, M ^c   Becker, P ^c   Oechsner, H ^c   Dollinger, G ^d   Bergmaier, A ^d  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

^c IFOS   (Germany)

^d TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

BCN; Magnetron; Phase separation; Thin films

Indexed keywords

ARGON; BORON CARBIDE; HARDNESS; ION IMPLANTATION; MAGNETRON SPUTTERING; PHASE SEPARATION; TERNARY SYSTEMS; THIN FILMS;

SUPERHARD FILMS;

CUBIC BORON NITRIDE;

EID: 0032093656     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00307-5     Document Type: Article

References (30)

1. M. Clihowalhi. Y. Yin. G.A.J. Amaraumua, D.R. McKenzie, T. Frauenheim, Diamond Relat. Mater. 6 (1997) 207.
2. A.Y. Liu, R.M. Lambrecht, R.M. Wentzcovitek, M.L. Cohen. Plus. Rev. B 39 (1989) 1760.
3. W.R.L. Lambrecht, B. Segall, Phys. Rev. B 47 (1993) 9289.
4. A.W. Moore, S.I., Strong, G.L. Doll, M.S. Drenelhaus, I.L., Spain, C.W. Bowers, J.P. Ini, L. Piraux, J. Appl. Phys. 65 (1989) 5109.
5. T.M. Besmann, J. Am. Ceram. Soc. 73 (1990) 2498.
6. A. Derre, L. Filipozzi, F. Peron. J. Phys. IV 3 (1993) 195.
7. F. Sauynac, F. Teyssandiev, A. Marchand. J. Am. Ceram. Soc. 75 (1992) 161.
8. M. Yamade, M. Nakaishi, K. Sugisshima, J. Electrochem. Soc. 137 (1990) 2242.
9. E.H.A. Dekempeneer, V. Wagner, L.J. van Itzendoorn, J. Meneve, S. Kuypers, J. Smeets, J. Geurts, R. Candano, Paper presented at Int. Conf. Metallurgical Coatings and Thin Films, 22-26. April, 1996, San Diego, CA.
10. K. Montasser, S. Hattori, Thin Solid Films 117 (1984) 311.
11. J. Bill, R. Riedel, G. Panning, Z. Anorg. Allg. Chem. 610 (1992) 83.
12. N. Kawaguchi, T. Kawashima, J. Chem. Soc. Chem. Commun. 14 (1993) 1133.
13. M. Hubacek, T. Sato, J. Solid State Chem. 114 (1995) 258.
14. A.R. Badzian, Mater. Res. Bull. 16 (1981) 1385.
15. T. Sasaki, M. Akaishi, S. Yamoaka, Y. Fujiki, T. Oikawa. Chem. Mater. 5 (1993) 695.
16. A. Schütze, K. Bewilogua, H. Lüthje, S. Koupstidis, S. Jäger, Surf. Coat. Technol. 7475 (1995) 717.
17. S. Ulrich. J. Scherer, J. Schwan, I. Barzen, K. Jung, H. Ehrhardt, Diamond Relat. Mater. 4 (1995) 288.
18. S. Ulrich, J. Scherer, J. Schwan, I. Barzen, M. Scheib, H. Ehrhardt, Appl. Phys Lett. 68 (1996) 909.
19. G. Keller, I. Barzen, R. Erz, W. Dötter, S. Ulrich, K. Jung, H. Ehrhardt, Fresenius J. Analyt. Chem. 341 (1991) 349.
20. T. Theel, Diplomarbeit, Universität Kaiserslautern, Germany, 1996.
21. J. Robertson, Diamond Relat. Mater. 3 (1994) 361.
22. Y. Lifshitz, S.R. Kasi, J.W. Rabalais, W. Eckstein, Phys. Rev. B 41 (1990) 10468.
23. C.A. David, Thin Solid Films 226 (1993) 30.
24. G. Hanke, M. Kramer, K. Mueller, Mater. Sci. For. 5455 (1990) 207.
25. S.R. Kasi, H. Kang, J.W. Rabalais, J. Chem. Phys. 9 (1988) 88.
26. H. Holleck, F. Kimm, A. Kratzsch, M. Stuber, S. Ulrich, C.I. Chiang, O. Meyer. in: G. Kneringer, P. Rödhammer, P. Wilhartitz (Eds.), 14th Int. Plansee Seminar '97, Plansee Proc., 4, accepted.
27. H. Y. Tong, J.T. Wang, B.Z. Ding, H.G. Jiang, K. Lu, J. Non-Cryst. Solids 150 (1992) 444.
28. X.D. Liu, K. Lu, B.Z. Ding, Z.Q. Hu, Chinese Sci. Bull. 39 (1994) 27.
29. T. Kulik, T. Horubala, H. Matyja, Mater. Sci. Eng. A 157 (1992) 107.
30. P. Gorria, I. Orue, F. Plazaola, J.M. Barandian. J. Appl. Phys. 73 (1993) 6600.