Transparent BCN coatings by RF PACVD at low temperature using metallo-organic precursors

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 894-898

  Ahn, H ^a   Alberts, L ^a   Wohle J ^b   Rie, K T ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

RF PACVD; Transparent BCN

Indexed keywords

DEPOSITION; POLYCARBONATES; SUBSTRATES; SURFACE ROUGHNESS; ULTRAVIOLET SPECTROSCOPY;

RADIO FREQUENCY PLASMA;

COATING TECHNIQUES;

BORON; CARBON; COATING; CORROSION RESISTANCE; DEPOSITION; HARDNESS; NITROGEN; WEAR RESISTANCE;

EID: 0035386657     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01103-3     Document Type: Article

References (15)