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Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 471-474

Hard amorphous hydrogenated carbon-nitrogen films obtained by PECVD in methane-ammonia atmospheres

(4) Franceschini, D F a Freire Jr , F L a Achete, C A b Mariotto, G c

a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO (Brazil)

b FEDERAL UNIVERSITY OF RIO DE JANEIRO (Brazil)

c UNIVERSITY OF TRENTO (Italy)

Author keywords

Amorphous carbon nitrogen films; Internal stress; PECVD; Structural characterization

Indexed keywords

EID: 0000604129 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(96)80061-6 Document Type: Article

Times cited : (39)

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