Low energy ion impact-enhanced growth of cubic boron nitride in a supersonic nitrogen/argon plasma flow

Journal of Materials Research

Volumn 12, Issue 8, 1997, Pages 2014-2026

  Berns, D H ^a   Cappelli, M A ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; ION BOMBARDMENT; NITROGEN; PLASMA FLOW; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SUBSTRATES; SUPERSONIC FLOW; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

PHYSICAL VAPOR DEPOSITION (PVD);

CUBIC BORON NITRIDE;

EID: 0031213025     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0271     Document Type: Article

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