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Volumn 12, Issue 3-7, 2003, Pages 1079-1083
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BCN films with controlled composition obtained by the interaction between molecular beams of B and C with nitrogen ion beams
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Author keywords
BCN films; Carbon; Hard coatings; Ion beam assisted deposition
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Indexed keywords
COMPOSITION;
ELECTRON BEAMS;
ENERGY DISPERSIVE SPECTROSCOPY;
MOLECULAR BEAMS;
POSITIVE IONS;
MOLECULAR FLUXES;
THIN FILMS;
DIAMOND;
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EID: 0037846191
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(02)00276-5 Document Type: Article |
Times cited : (36)
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References (13)
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