SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 9, Issue 3-6, 2000, Pages 502-505

BCN thin films near the B4C composition deposited by radio frequency magnetron sputtering

(4) Lousa, A a Esteve, J a Muhl, S b Martinez E a

a UNIVERSITY OF BARCELONA (Spain)

b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

Author keywords

Carbides; Hard materials; Magnetron sputtering; Thin films

Indexed keywords

ARGON; CARBON INORGANIC COMPOUNDS; FILM GROWTH; HARDNESS; MAGNETRON SPUTTERING; MOLECULAR STRUCTURE; NITROGEN; SINTERING; SPUTTER DEPOSITION; STRESS ANALYSIS; THIN FILMS;

BORON CARBONITRIDE; RADIO FREQUENCY MAGNETRON SPUTTERING;

BORON CARBIDE;

BORON; BORON CARBIDE; CARBON; DEPOSITION; FILM; NITROGEN;

EID: 0034086442 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(99)00319-2 Document Type: Conference Paper

Times cited : (56)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.