Synthesis and mechanical properties of BCN coatings deposited by PECVD

Vacuum

Volumn 68, Issue 4, 2002, Pages 335-339

  Kurapov, D ^a   Neuschutz D ^a   Cremer, R ^a   Pedersen, T ^a   Wuttig, M ^a   Dietrich, D ^b   Marx, G ^b   Schneider, J M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Boron carbonitride; Mechanical properties; PECVD; Stress measurements; Transmission electron microscopy

Indexed keywords

ANISOTROPY; BORON COMPOUNDS; COMPOSITION; CRYSTAL STRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRESSES; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMODYNAMICS; TRANSMISSION ELECTRON MICROSCOPY;

PRECURSORS;

PROTECTIVE COATINGS;

EID: 0037073610     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00506-7     Document Type: Article

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