Deposition of boron carbon nitride films by dual cathode magnetron sputtering

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 250-253

  Kusano, Y ^a   Evetts, J E ^a   Hutchings, I M ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Boron carbon nitride; Coefficient of friction; Fourier transform infrared spectroscopy; Magnetron sputtering

Indexed keywords

ABSORPTION SPECTROSCOPY; BORON COMPOUNDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FRICTION; MAGNETRON SPUTTERING; MOLECULAR STRUCTURE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SODIUM CHLORIDE; SPUTTER DEPOSITION; SUBSTRATES; TRIBOLOGY;

BORON CARBON NITRIDE; FRICTION COEFFICIENT;

CERAMIC COATINGS;

EID: 0032670792     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01637-X     Document Type: Article

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