A comparison of low-pressure CVD synthesis of diamond and c-BN

International Journal of Refractory Metals and Hard Materials

Volumn 14, Issue 1-3 SPEC. ISS., 1996, Pages 145-157

  Bartl, A ^a   Bohr, S ^a   Haubner, R ^a   Lux, B ^a  

^a INSTITUTE FOR MICROELECTRONICS   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043015494     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/0263-4368(96)83428-7     Document Type: Review

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