Multigate silicon MOSFETs for 45 nm node and beyond

Solid-State Electronics

Volumn 50, Issue 1, 2006, Pages 18-23

  Poiroux, T ^a   Vinet, M ^a   Faynot, O ^a   Widiez, J ^b   Lolivier, J ^a   Previtali, B ^a   Ernst, T ^a   Deleonibus, S ^a  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; GATES (TRANSISTOR); SILICON;

DEVICE SCALING; ELECTROSTATIC CONTROL; MULTI-GATE ARCHITECTURES;

MOSFET DEVICES;

EID: 30344446392     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2005.10.049     Document Type: Conference Paper

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