Ultimately thin SOI MOSFETs: Special characteristics and mechanisms

IEEE International SOI Conference

Volumn , Issue , 1999, Pages 92-93

  Ernst, T ^a   Munteanu, D ^a   Cristoloveanu, S ^a   Ouisse, T ^a   Hefyene, N ^a   Horiguchi, S ^a   Ono, Y ^a   Takahashi, Y ^a   Murase, K ^a  

^a Grenoble INP Phelma   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONIC PROCESSING; MONOLAYERS; MOSFET DEVICES; SEMICONDUCTING SILICON;

SINGLE-ELECTRON-TRANSISTOR-BASED MICROELECTRONICS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0033332312     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)