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2 for SBT. The structures were developed by immersing the exposed sample 1 min in toluene and were dried by blowing with nitrogen
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2 for SBT. The structures were developed by immersing the exposed sample 1 min in toluene and were dried by blowing with nitrogen.
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9
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85034182597
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During the pyrolysis the lateral dimensions of one mesa decrease and this shrinkage process continues during the crystallization anneal. For PZT 30% shrinkage is observed after the pyrolysis and a total shrinkage of about 45% after crystallization
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During the pyrolysis the lateral dimensions of one mesa decrease and this shrinkage process continues during the crystallization anneal. For PZT 30% shrinkage is observed after the pyrolysis and a total shrinkage of about 45% after crystallization.
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16
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85034193805
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Due to the tip shape (triangular with an apex radius ∼50 nm) piezoelectric images of structures under 250 nm lateral size are highly distorted, but still show a piezoelectric contrast revealing switching process
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Due to the tip shape (triangular with an apex radius ∼50 nm) piezoelectric images of structures under 250 nm lateral size are highly distorted, but still show a piezoelectric contrast revealing switching process.
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