Morphology and electrical properties of SrTiO3-films on conductive oxide films

Journal of the European Ceramic Society

Volumn 21, Issue 10-11, 2001, Pages 1597-1600

  Reichmann, K ^a   Schneller, T ^b   Hoffmann Eifert, S ^c   Hasenkox, U ^b   Waser, R ^b  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Capacitors; Chemical solution deposition; Electrical properties; Electron microscopy; Perovskites

Indexed keywords

ELECTRIC CURRENTS; MORPHOLOGY; OXIDES; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

LEAKAGE CURRENT;

THIN FILMS;

CERAMICS;

EID: 0034883851     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(01)00073-5     Document Type: Article

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