A comparison of diol and methanol-based chemical solution deposition routes for PZT thin film fabrication

Integrated Ferroelectrics

Volumn 18, Issue 1-4, 1997, Pages 275-286

  Schwartz, Robert W ^a   Reichert, Tammy L ^a   Clem, Paul G ^a   Dimos, Duane ^a   Liu, David ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b AVX CORPORATION   (United States)

Author keywords

CSD; Decoupling capacitors; Diol; PZT; Thick coatings

Indexed keywords

CAPACITORS; COATINGS; DEPOSITION; DIELECTRIC PROPERTIES; ELLIPSOMETRY; FERROELECTRIC MATERIALS; HEAT TREATMENT; LEAD COMPOUNDS; OPTICAL MICROSCOPY; SOLUTIONS; SURFACE TENSION; THIN FILMS;

DECOUPLING CAPACITOR; DIOL BASED SOLUTION; FERROELECTRIC PROPERTY; LEAD ZIRCONIUM TITANATE; LOW TEMPERATURE HEAT TREATMENT; THICK COATING;

DIELECTRIC FILMS;

EID: 0031381709     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708221705     Document Type: Review

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