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Journal of Materials Research

Volumn 16, Issue 4, 2001, Pages 1145-1154

Rational solvent selection strategies to combat striation formation during spin coating of thin films

(1) Birnie III, Dunbar P a

a University of Arizona (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; EVAPORATION; SOLVENTS; SPIN COATING; SURFACE CHEMISTRY; SURFACE TENSION; VAPOR PRESSURE; VISCOUS FLOW;

DUAL-SOLVENT SYSTEMS; STRIATION DEFECTS;

THIN FILMS;

EID: 0035322557 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0158 Document Type: Article

Times cited : (113)

References (49)

1
- 36849135206
- (1958) J. Appl Phys. , vol.29 , pp. 858
- Emslie, A.G.¹ Bonner, F.T.² Peck, C.G.³

2
- 0017996995
- (1978) J. Appl. Phys. , vol.49 , pp. 3993
- Meyerhofer, D.¹

3
- 0023400165
- (1987) J. Imaging Technol. , vol.13 , pp. 122
- Bornside, D.E.¹ Macosko, C.W.² Scriven, L.E.³

4
- 0021477334
- (1984) J. Appl. Phys. , vol.56 , pp. 1199
- Flack, W.W.¹ Soong, D.S.² Bell, A.T.³ Hess, D.W.⁴

5
- 84964329969
- (1988) Phys. Fluids , vol.31 , pp. 2786
- Lawrence, C.J.¹

6
- 0000564226
- (1990) Phys. Fluids A , vol.2 , pp. 453
- Lawrence, C.J.¹

7
- 0026138880
- (1991) J. Non-Newtonian Fluid Mech. , vol.39 , pp. 137
- Lawrence, C.J.¹ Zhou, W.²

8
- 0001401656
- (1989) Phys. Fluids A , vol.1 , pp. 1949
- Ohara, T.¹ Matsumoto, Y.² Ohashi, H.³

9
- 0023367526
- (1987) Jpn. J. Appl. Phys. , vol.26
- Shimoji, S.¹

10
- 0021529282
- (1984) Ind. Eng. Chem. Fundam. , vol.23 , pp. 425
- Jenekhe, S.A.¹

11
- 0033707123
- (2000) Proc. SPIE , vol.3943 , pp. 280
- Haas, D.E.¹ Quijada, J.N.² Picone, S.J.³ Birnie D.P. III⁴

12
- 0020749520
- (1983) Polym. Eng. Sci. , vol.23 , pp. 399
- Chen, B.T.¹

13
- 0009191220
- (1982) J. Electrochem. Soc. , vol.129 , pp. 2881
- Malangone, R.¹ Needham, C.D.²

14
- 0009187139
- Thickness variance of spun-on photoresist
- San Diego, CA (Kodak, Rochester, NY)
- (1978) Kodak Microelectronics Seminar Proceedings , pp. 15-20
- Daughton, W.J.¹ O'Hagan, P.² Givens, F.L.³

15
- 0026173059
- (1991) J. Electrochem. Soc. , vol.138 , pp. 1712
- Sukanek, P.C.¹

16
- 0022113347
- (1985) J. Imaging Technol. , vol.11 , pp. 184
- Sukanek, P.C.¹

17
- 0026014394
- (1991) J. Electrochem. Soc. , vol.138 , pp. 317
- Bornside, D.E.¹ Macosko, C.W.² Scriven, L.E.³

18
- 0018542153
- (1979) Polym. Eng. Sci. , vol.19 , pp. 1117
- Lai, J.H.¹

19
- 0001401656
- (1989) Phys. Fluids A , vol.1 , pp. 1949
- Ohara, T.¹ Matsumoto, Y.² Ohashi, H.³

20
- 0001113055
- (1997) Phys. Fluids , vol.9 , pp. 870
- Birnie D.P. III¹ Manley, M.²

21
- 0031549353
- (1997) J. Non-Cryst. Solids , vol.218 , pp. 174
- Birnie D.P. III¹

22
- 0029639611
- (1995) J. Appl. Polym. Sci. , vol.57 , pp. 717
- Gu, J.¹ Bullwinkel, M.D.² Campbell, G.A.³

23
- 0030129045
- (1996) Polym. Eng. Sci. , vol.36 , pp. 1019
- Gu, J.¹ Bullwinkel, M.D.² Campbell, G.A.³

24
- 0000582496
- (1993) J. Phys. III Fr. , vol.3 , pp. 2059
- Horowitz, F.¹ Yeatman, E.² Dawnay, E.³ Fardad, A.⁴

25
- 28444438083
- (1994) SPIE Proc. , vol.2288 , pp. 67
- Horowitz, F.¹ Yeatman, E.² Dawnay, E.³ Fardad, A.⁴

26
- 0000036006
- (1992) Opt. Eng. , vol.31 , pp. 2012
- Birnie D.P. III¹ Zelinski, B.J.J.² Marvel, S.P.³ Melpolder, S.M.⁴ Roncone, R.⁵

27
- 0029313805
- (1995) Opt. Eng. , vol.34 , pp. 1782
- Birnie D.P. III¹ Zelinski, B.J.J.² Perry, D.L.³

28
- 85037010833
- (1995) Opt. Interference Coat. '95, Tech. Digest
- Birnie D.P. III¹ Manley, M.² Zelinski, B.J.J.³ Melpolder, S.M.⁴

29
- 33751384899
- PZT coatings were made using a technique developed
- (1993) Chem. Mat. , vol.5 , pp. 511
- Assink, R.A.¹ Schwartz, R.W.²

30
- 0000248451
- (1900) Rev. Gen. Sci. Pures Appl. Bull Assoc. Fr. Av. Sci. , vol.11 , pp. 1261
- Benard, H.¹

31
- 0022862415
- (1986) SPIE Proc. , vol.631 , pp. 192
- Daniels, B.K.¹ Szmanda, C.R.² Templeton, M.K.³ Trefonas P. III⁴

32
- 0029360096
- (1995) J. Am. Ceram. Soc. , vol.78 , pp. 2254
- Due, X.M.¹ Orignac, X.² Almeida, R.M.³

33
- 0001569395
- (1956) Nature , vol.178 , pp. 650
- Block, M.J.¹

34
- 84947690949
- (1958) J. Fluid Mech. , vol.4 , pp. 489
- Pearson, J.R.A.¹

35
- 0003777714
- Chemical Rubber Co., Boca Raton, FL, edition on CDROM
- (1999) CRC Handbook of Chemistry and Physics

36
- 33751154833
- (1995) J. Chem. Eng. Data , vol.40 , pp. 611
- Vazquez, G.¹ Alvarez, E.² Navaza, J.M.³

37
- 85037009666
- submitted for publication
- (2000) J. Mater. Sci.
- Haas, D.E.¹ Birnie D.P. III²

38
- 84913346476
- (1964) J. Fluid Mech. , vol.19 , pp. 341
- Nield, D.A.¹

39
- 33947324712
- (1968) Ind. Eng. Chem. Fundam. , vol.7 , Issue.1 , pp. 53
- Vidal, A.¹ Acrivos, A.²

40
- 85171998034
- (1966) J. Math. Phys. , vol.45 , pp. 150
- Benney, D.J.¹

41
- 0025475598
- (1990) J. Fluid Mech. , vol.217 , pp. 469
- Smith, M.K.¹

42
- 0009188473
- (1997) Rev. Mod. Phys. , vol.69 , pp. 93
- Oron, A.¹ Davis, S.H.² Bankoff, S.G.³

43
- 33745635003
- (1960) Nature , vol.187 , pp. 186
- Scriven, L.E.¹ Sternling, C.V.²

44
- 0000274711
- (1855) Philos. Mag. , vol.10 , pp. 330
- Thomson, J.¹

45
- 4444332101
- (1992) J. Fluid Mech. , vol.235 , pp. 399
- Gaver, D.P.¹ Grotberg, J.B.²

46
- 0004191671
- Wiley, New York
- (1998) Distillation: Principles and Practices
- Stichlmair, J.¹ Fair, J.R.²

47
- 0004146612
- University Science Books, Sausalito, CA
- (1983) Chemical Thermodynamics
- Rock, P.A.¹

48
- 0003484845
- Academic Press, Boston, MA
- (1990) Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing
- Brinker, C.J.¹ Scherer, G.W.²

49
- 85037016905
- submitted for publication
- (2000) Chem. Mater.
- Taylor, D.J.¹ Birnie D.P. III²

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