Influence of precursor chemistry on the formation of MTiO3 (M = Ba, Sr) ceramic thin films

Journal of Sol-Gel Science and Technology

Volumn 12, Issue 2, 1998, Pages 67-79

  Hasenkox, U ^a   Hoffmann, S ^a   Waser, R ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

BaTiO3 SrTiO3 thin films; Dielectric properties; Formation mechanism; Precursor influence

Indexed keywords

BARIUM COMPOUNDS; CERAMIC MATERIALS; CRYSTALLIZATION; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROSTRUCTURE; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SOLUTIONS; STRONTIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS; BARIUM TITANATE; DENSIFICATION; DIELECTRIC PROPERTIES;

CERAMIC THIN FILMS; FORMATION MECHANISM; PRECURSOR INFLUENCE; CHEMICAL SOLUTION DEPOSITION; STRONTIUM TITANATE;

THIN FILMS;

EID: 0032179749     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026480027046     Document Type: Article

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