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Thin Solid Films

Volumn 496, Issue 2, 2006, Pages 346-352

Atomic layer deposition and post-deposition annealing of PbTiO3 thin films

(4) Harjuoja, Jenni a Kosola, Anne a Putkonen, Matti a Niinistö, Lauri a

a AALTO UNIVERSITY (Finland)

Author keywords

Atomic layer deposition; Lead titanate

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; DEPOSITION; LEAD COMPOUNDS; OXYGEN; STOICHIOMETRY; WATER;

ATOMIC LAYER DEPOSITION; LEAD TITANATE; PULSING RATIO;

THIN FILMS;

EID: 28144458577 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.09.026 Document Type: Article

Times cited : (48)

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