Fabrication of PbTiO3 thin films by laser metalorganic chemical vapor deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 408-411

  Tokita, Koji ^a   Okada, Fumio ^a  

^a JAPAN ENERGY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HEATING; LASER BEAM EFFECTS; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

LASER DEPOSITION;

TITANIUM COMPOUNDS;

EID: 0031546251     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00599-X     Document Type: Article

References (7)

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4. K. Tokita, F. Okada and H. Segawa, Rev. Laser Eng. 23 (1995) 355 [in Japanese].
5. K. Tokita and F. Okada, J. Appl. Phys., to be published.
6. T. Hirai, T. Goto, H. Matsuhashi, S. Tanimoto and Y. Tarui, Japan. J. Appl. Phys. 32 (1993) 4078.
7. M. Otsu, H. Funakubo, K. Shinozaki and N. Mizutani, in: Advanced Materials '93, I/B: Trans. Mat. Res. Soc. Japan., Vol. 14 B (Elsevier, Amsterdam, 1994) p. 42.