High-temperature oxidation of CrN/AlN multilayer coatings

Applied Surface Science

Volumn 252, Issue 5, 2005, Pages 1339-1349

  Bardi, U ^a,b   Chenakin, S P ^c   Ghezzi, F ^d   Giolli, C ^a,b   Goruppa, A ^e   Lavacchi, A ^a,b   Miorin, E ^f   Pagura, C ^f   Tolstogouzov, A ^a,b  

^a UNIVERSITY OF FLORENCE   (Italy)

^b Area di Ricerca CNR di Firenze   (Italy)

^c INSTITUTE OF METAL PHYSICS   (Ukraine)

^d CNR   (Italy)

^e TEER COATINGS LTD   (United Kingdom)

^f CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

Depth profiling; Mass resolved ion scattering spectrometry (MARISS); Nitride multilayer coatings; Secondary ion mass spectrometry (SIMS); Unbalanced magnetron sputtering; X ray photoelectron spectroscopy (XPS)

Indexed keywords

COATINGS; DIFFUSION; HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; MULTILAYERS; OXIDATION; SAMPLING; SECONDARY ION MASS SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILING; MASS-RESOLVED ION SCATTERING SPECTROMETRY (MARISS); NITRIDE MULTILAYER COATINGS; UNBALANCED MAGNETRON SPUTTERING;

CHROMIUM COMPOUNDS;

EID: 27944473283     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.02.105     Document Type: Article

References (54)

1. P. Verardi, M. Dinescu, C. Gerardi, M. Mirenghi, and V. Sandu Appl. Surf. Sci. 109-110 1997 371
2. C. Emery, A.R. Chourasia, and P. Yashar J. Electron Spectrosc. Relat. Phenom. 104 1999 312
3. N. Duez, B. Mutel, O. Dessaux, P. Goudmand, and J. Grimblot Surf. Coat. Technol. 125 2000 79
4. A. Barata, L. Cunha, and C. Moura Thin Solid Films 388/389 2001 501
5. C. Leyens, M. Peters, P.Eh. Hovsepian, D.B. Lewis, Q. Luo, and W.-D. Münz Surf. Coat. Technol. 155 2002 103
6. G.S. Kim, S.Y. Lee, J.H. Hahn, and S.Y. Lee Surf. Coat. Technol. 171 2003 91
7. J.C. Vickerman Surface Analysis - The Principal Techniques 1997 Wiley Chichester
8. Teer Coatings Ltd, West Stone House, Droitwich, Worcestershire WR9 9AS, UK.
9. A. Benninghoven, F.G. Rüdenauer, and H.W. Werner Secondary Ion Mass Spectrometry 1989 Wiley New York
10. R.G. Wilson, F.A. Stevie, and C.W. Magee Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis 1989 Wiley New York
11. P.C. Zalm, and L.J. Beckers Surf. Sci. 152/153 1985 135
12. A. Tolstogouzov, and T. Kitaeva Pisma v Zhurnal Teknicheskoi Fiziki 20 1994 37 (in Russian)
13. K. Wittmaack Nucl. Instrum. Methods B 115 1996 288
14. K. Wittmaack Surf. Sci. 419 1999 249
15. Y. Kataoka, and K. Wittmaack Surf. Sci. 424 1999 299
16. M.A. Karolewski Surf. Sci. 517 2002 138
17. A. Tolstogouzov, and C.L. Greenwood Poverkhnost' (Russ.) 12 2002 33
18. C. Argile, and G.E. Rhead Surf. Sci. Rep. 10 1989 277
19. B. Ratner, and D. Castner J.C. Vickerman Surface Analysis - The Principal Techniques 1997 Wiley Chichester 43
20. E. Taglauer J.C. Vickerman Surface Analysis - The Principal Techniques 1997 Wiley Chichester 215
21. K. Wittmaack Surf. Sci. 345 1996 110
22. K. Franzreb, A. Pratt, S. Splinter, and P.A.W. van der Heide Surf. Interface Anal. 26 1998 597
23. A. Tolstogouzov, S. Daolio, and C. Pagura Surf. Sci. 441 1999 213
24. S. Daolio, C. Pagura, and A. Tolstogouzov Appl. Surf. Sci. 222 2004 166
25. A. Tolstogouzov, S. Daolio, and C. Pagura Nucl. Instrum. Methods B183 2001 116
26. A. Tolstogouzov, S. Daolio, C. Pagura, and C.L. Greenwood Int. J. Mass Spectrom. 214 2002 327
27. Hiden Analytical Ltd, 420 Europe Boulevard, Warrington WA5 7UN, England.
28. A. Lavacchi, B. Cortigiani, G. Rovida, U. Bardi, A. Atrei, R. Angelucci, L. Dori, S. Nicoletti, and A. Poggi Sens. Actuators B 71 2000 123
29. E. Galvanetto, F.P. Galliano, F. Borgioli, U. Bardi, and A. Lavacchi Thin Solid Films 384 2001 223
30. E. Martinez, R. Sanjinés, O. Banakh, and F. Lévy Thin Solid Films 447-448 2004 332
31. R. Sanjinés, O. Banakh, C. Rojas, P.E. Schmid, and F. Lévy Thin Solid Films 420-421 2002 312
32. U. Bardi, S. Caporali, S.P. Chenakin, A. Lavacchi, E. Miorin, C. Pagura, A. Tolstogouzov, Surf. Coat. Technol., in press (http://authors.elsevier.com/sd/ article/S0257897204011910).
33. A. Tolstogouzov Eur. Microsc. Anal. 3 1997 17
34. E. Laptev, unpublished data.
35. H.W. Werner, and P.R. Boudewijn A.W. Czanderna T.E. Madey C.J. Powell Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis 1998 Plenum Press New York 355
36. S. Hofmann Rep. Prog. Phys. 61 1998 827
37. M.G. Dowsett Appl. Surf. Sci. 203-204 2003 5
38. G. Gillen, M. Walker, P. Thompson, and J. Bennett J. Vac. Sci. Technol. B 18 2000 503
39. J. Matsuo, C. Okubo, T. Seki, T. Aoki, N. Toyoda, and I. Yamada Nucl. Instrum. Methods B219-B220 2004 463
40. S. Sun, C. Szakal, T. Roll, P. Mazarov, A. Wucher, and N. Winograd Surf. Interface Anal. 36 2004 1367
41. J.C. Sánchez-López, M.D. Alcalá, C. Real, and A. Fernández Nanostruct. Mater. 11 1999 249
42. O. Nishimura, K. Yabe, and M. Iwaki J. Electron Spectrosc. Relat. Phenom. 49 1989 335
43. F.M. Capece, V. Dicastro, C. Furlani, G. Mattogno, C. Fragale, M. Gargano, and M. Rossi J. Electron Spectrosc. Relat. Phenom. 27 1982 119
44. T. Belmonte, J.M. Thiébaut, and D. Mézerette J. Phys. D: Appl. Phys. 35 2002 1919
45. P.D. Schulze, S.L. Shaffer, R.L. Hance, and D.L. Utley J. Vac. Sci. Technol. A1 1983 97
46. J. Li, Q. Zhang, S.F. Yoon, J. Ahn, Q. Zhou, S. Wang, D. Yang, and Q. Wang J. Appl. Phys. 92 2002 6275
47. D. Tománek, S. Mukherjee, V. Kumar, and K.H. Bennemann Surf. Sci. 114 1982 11
48. S.P. Chenakin Metallofizika i Noveishie Tekhnologii 24 12 2002 1665 (in Russian)
49. W.Y. Howng, and R.J. Thorn J. Chem. Phys. Solids 41 1980 75
50. A.M. Salvi, J.E. Castle, J.F. Watts, and E. Desimoni Appl. Surf. Sci. 90 1995 333
51. T.L. Barr J. Vac. Sci. Technol. A 9 1991 1793
52. G.C. Allen, S.J. Harris, J.A. Jutson, and J.M. Dyke Appl. Surf. Sci. 37 1989 111
53. B.R. Strohmeier, and D.M. Hercules J. Phys. Chem. 88 1984 4922
54. C.P. Li, A. Proctor, and D.M. Hercules Appl. Spectrosc. 38 1984 880