Identification of LEIS contributions observed in the ion kinetic energy distributions collected on a Cameca IMS-3f SIMS instrument

Surface and Interface Analysis

Volumn 26, Issue 8, 1998, Pages 597-605

  Franzreb, Klaus ^a   Pratt, Allen ^a   Splinter, Steven ^a,b   Van Der Heide, Paul ^a,c  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b CANTEST Ltd   (Canada)

^c University of Houston   (United States)

Author keywords

LEIS; Low energy ion scattering; Secondary ion mass spectrometry; SIMS

Indexed keywords

IONS; MASS SPECTROMETERS; SCATTERING; SECONDARY ION MASS SPECTROMETRY; SPECTRUM ANALYSIS; SURFACES;

ION EMISSION; SECONDARY EMISSION;

ION BOMBARDMENT;

EID: 0032114768     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199807)26:8<597::AID-SIA399>3.0.CO;2-I     Document Type: Article

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