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Volumn 441, Issue 1, 1999, Pages 213-222

Evaluation of inelastic energy losses for low-energy Ne+ ions scattered from aluminum and silicon surfaces

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ENERGY DISSIPATION; IONS; ISOTOPES; MASS SPECTROMETRY; NEON; SILICON;

EID: 0033363353     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00881-X     Document Type: Article
Times cited : (49)

References (40)
  • 25
    • 0003680309 scopus 로고
    • N.H. Tolk, J.C. Tully, W. Heiland, & C.W. White. New York: Academic Press
    • Hagstrum H.D. Tolk N.H., Tully J.C., Heiland W., White C.W. Inelastic Ion-Surface Collisions. 1977;1 Academic Press, New York.
    • (1977) Inelastic Ion-Surface Collisions , pp. 1
    • Hagstrum, H.D.1
  • 28
    • 85031582749 scopus 로고    scopus 로고
    • Hiden Analytical Ltd, 20 Europe Boulevard, Gemini Business Park, Warrington WA5 5TN, UK
    • Hiden Analytical Ltd, 20 Europe Boulevard, Gemini Business Park, Warrington WA5 5TN, UK.
  • 29
    • 85031591650 scopus 로고
    • SIMION 3D Version 6.0 User's Manual
    • Princeton: Princeton Systems
    • Dahl D.A. SIMION 3D Version 6.0 User's Manual. INEL-95/0403. 1995;Princeton Systems, Princeton.
    • (1995) INEL-95/0403
    • Dahl, D.A.1
  • 33
    • 0003127705 scopus 로고
    • Characteristics of Sputtered Particles, Technical Applications
    • R. Behrisch, & K. Wittmaack. Berlin: Springer
    • Hofer W.O. Behrisch R., Wittmaack K. Characteristics of Sputtered Particles, Technical Applications. Sputtering by Particle Bombardment. vol. III:1991;15 Springer, Berlin.
    • (1991) Sputtering by Particle Bombardment , vol.3 , pp. 15
    • Hofer, W.O.1
  • 37
    • 0343123990 scopus 로고
    • The Scattering Integrals: Integration and Accuracy
    • Schlanger H.G., Eckstein W. The Scattering Integrals: Integration and Accuracy. IPP 6/69. 1991.
    • (1991) IPP 6/69
    • Schlanger, H.G.1    Eckstein, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.