Role of active species in surface cleaning by an Ar-N2 atmospheric pressure post-discharge

Journal of Physics D: Applied Physics

Volumn 35, Issue 16, 2002, Pages 1919-1926

  Belmonte, T ^a   Thiebaut J M ^a   Mezerette D ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL BONDS; ETCHING; INERT GASES; PHOTONS; PLASMA APPLICATIONS; RELAXATION PROCESSES; X RAY PHOTOELECTRON SPECTROSCOPY;

SURFACE CONTAMINANTS;

SURFACE CLEANING;

EID: 0037151392     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/35/16/304     Document Type: Article

References (23)