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International Journal of Mass Spectrometry

Volumn 214, Issue 3, 2002, Pages 327-337

Energy distributions of secondary ions sputtered from aluminium and magnesium by Ne+, Ar+ and O2+: A comprehensive study

(4) Tolstogouzov, A a Daolio, S a Pagura, C a Greenwood, C L b

a CNR (Italy)

b HIDEN ANALYTICAL LTD (United Kingdom)

Author keywords

Aluminium; Energy distribution; Ion sputtering; Magnesium; Mass energy analysis; Secondary ion emission

Indexed keywords

ALUMINUM; ARGON; MAGNESIUM; NEON; OXYGEN;

ANALYZER; CONFERENCE PAPER; ENERGY; EXPERIMENTATION; KINETICS; MASS SPECTROMETRY;

EID: 0037086638 PISSN: 13873806 EISSN: None Source Type: Journal
DOI: 10.1016/S1387-3806(02)00523-7 Document Type: Conference Paper

Times cited : (43)

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