Electronic properties of Cr1-xAlxN thin films deposited by reactive magnetron sputtering

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 312-317

  Sanjinés, Rosendo ^a   Banakh, O ^a   Rojas, C ^a   Schmid, P E ^a   Levy F ^a  

^a EPFL   (Switzerland)

Author keywords

Cr Al N; CrN; Nitrides thin films; X Ray photoemission spectroscopy (XPS)

Indexed keywords

CHEMICAL BONDS; CHROMIUM COMPOUNDS; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

VALENCE BAND (VB) SPECTRA;

THIN FILMS;

EID: 0037011098     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00830-1     Document Type: Conference Paper

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