SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 171, Issue 1-3, 2003, Pages 91-95

Synthesis of CrN/AlN superlattice coatings using closed-field unbalanced magnetron sputtering process

(3) Kim, Gwang S a Lee, Sang Y a,c Hahn, Jun H b

a Hankuk Aviation University (South Korea)

b Korea Research Institute of Standards and Science (South Korea)

c Korea Institute of Machine and Materials (South Korea)

Author keywords

CrN AlN superlattice coatings; Nano indentation; TEM; Unbalanced magnetron sputtering

Indexed keywords

ALUMINUM NITRIDE; CHROMIUM COMPOUNDS; COMPOSITION; CRYSTAL MICROSTRUCTURE; DISLOCATIONS (CRYSTALS); EMISSION SPECTROSCOPY; FILMS; HARDNESS; INDENTATION; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; PLASTIC DEFORMATION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

NANO-INDENDATION TESTS;

SUPERLATTICES;

CHEMICAL COMPOSITION; COATING; MECHANICAL PROPERTY; MICROSTRUCTURE; SYNTHESIS;

EID: 0038241640 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00244-5 Document Type: Article

Times cited : (132)

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