NSF 2000 workshop on manufacturing of micro-electro-mechanical systems

Journal of Materials Processing and Manufacturing Science

Volumn 8, Issue 4, 2001, Pages 292-306

  Tseng, A A ^a   Tang, W C ^a   Lee, Y C ^a   Allen, J ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUILT-IN SELF TEST; COMPUTER AIDED DESIGN; COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONICS PACKAGING; INTEGRATED CIRCUITS; MICROELECTRONICS; MICROMACHINING; OPTIMIZATION; RELIABILITY; RESEARCH AND DEVELOPMENT MANAGEMENT; SILICON; TECHNICAL PRESENTATIONS;

MICRO ELECTRO MECHANICAL SYSTEMS (MEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0035300692     PISSN: 10620656     EISSN: None     Source Type: Journal    
DOI: 10.1106/NBDB-DKVQ-MJHR-FETC     Document Type: Conference Paper

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