Data format transferring for FIB microfabrication

International Journal of Advanced Manufacturing Technology

Volumn 16, Issue 8, 2000, Pages 600-602

  Fu, Y Q ^a   Bryan, N K A ^a   San, O A ^a   Hong, L B ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER WORKSTATIONS; DATA STRUCTURES; IMAGE ANALYSIS; IMAGE QUALITY;

DATA FORMAT TRANSFORMATIONS; MICROFABRICATIONS;

COMPUTER INTEGRATED MANUFACTURING;

EID: 0033688783     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s001700070050     Document Type: Article

References (3)

1. Craig Friedrich and Bharath Kikkeri, "Rapid fabrication of molds by mechanical micromilling: process development", Proceedings SPIE, 2640, pp. 161-171, 1995.
2. Micrion 9000/9100/9500 Focused Ion Beam Systems Operation Manual, Revision E, Micrion Corporation.
3. Jon Orloff (ed.), Handbook of Charged Particle Optics. Boca Raton, CRC Press, 1997.