Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

Optical Engineering

Volumn 39, Issue 11, 2000, Pages 3008-3013

  Yongqi, Fu ^a   Ngoi, Bryan Kok Ann ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

diffractive optical element; focused ion beam; microoptical lens; replication

Indexed keywords

DIFFRACTIVE OPTICS; ENERGY DISPERSIVE SPECTROSCOPY; ETCHING; FABRICATION; ION BEAM LITHOGRAPHY; OPTICAL INSTRUMENT LENSES; OPTICAL VARIABLES MEASUREMENT; SCANNING ELECTRON MICROSCOPY; SPUTTERING;

DIFFRACTIVE OPTICAL ELEMENTS; FOCUSED ION BEAM; GAS ASSISTANT ETCHING; MICROFABRICATION; MICROOPTICAL ELEMENTS; MICROOPTICAL LENS;

MICROOPTICS;

EID: 0034314872     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1312647     Document Type: Article

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