Damage generation and removal in the Ga+ focused ion beam micromachining of GaN for photonic applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3063-3067

  Chyr, Irving ^a   Lee, Boon ^a   Chao, L C ^a   Steckl, A J ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040708608     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

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