Surface and interface morphology and structure of amorphous carbon thin and multilayer films

Diamond and Related Materials

Volumn 14, Issue 8, 2005, Pages 1241-1254

  Patsalas, P ^a,c   Logothetidis, S ^a   Kelires, P C ^b  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

^b UNIVERSITY OF CRETE   (Greece)

^c UNIVERSITY OF IOANNINA   (Greece)

Author keywords

Amorphous carbon; Interface structure; Ion assisted deposition; Surface characterization

Indexed keywords

AMORPHOUS MATERIALS; COMPUTER SIMULATION; DEPOSITION; INTERFACES (MATERIALS); LIGHT REFLECTION; LIGHT SCATTERING; MONTE CARLO METHODS; MORPHOLOGY; MULTILAYERS; REFRACTIVE INDEX; SURFACES; THIN FILMS;

AMORPHOUS CARBON; INTERFACE STRUCTURE; ION ASSISTED DEPOSITION; SURFACE CHARACTERIZATION;

CARBON;

EID: 22944479335     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.039     Document Type: Conference Paper

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