Studies of density and surface roughness of ultrathin amorphous carbon films with regards to thickness with x-ray reflectometry and spectroscopic ellipsometry

Applied Physics Letters

Volumn 71, Issue 17, 1997, Pages 2463-2465

  Logothetidis, S ^a   Stergioudis, G ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000702263     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120089     Document Type: Article

References (24)

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