Microstructure and nanomechanical and optical properties of single- and multi-layer carbon films synthesized by radio frequency sputtering

Surface and Coatings Technology

Volumn 168, Issue 1, 2003, Pages 12-22

  Lu, W ^a   Komvopoulos, K ^a   Patsalas, P ^b   Charitidis, C ^b   Gioti, M ^b   Logothetidis, S ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Carbon film; Indentation; Properties; Radio frequency sputtering; Spectroscopic ellipsometry; X ray diffraction; X ray reflectivity

Indexed keywords

ELLIPSOMETRY; ION BOMBARDMENT; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; RESIDUAL STRESSES; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY DIFFRACTION;

RADIO FREQUENCY SPUTTERING;

CARBON;

CARBON; COATING;

EID: 0037403446     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00841-1     Document Type: Article

References (48)

1. J.J. Cuomo, D.L. Pappas, J. Bruley, J.P. Doyle, K.L. Saenger, J. Appl. Phys. 70 (1991) 1706.
2. D.L. Pappas, K.L. Saenger, J. Bruley, W. Krakow, J.J. Cuomo, T. Gu, R.W. Collins, J. Appl. Phys. 71 (1992) 5675.
3. J. Schwan, S. Ulrich, H. Roth, E. Ehrhardt, S.R.P. Silva, J. Robertson, R. Samlenski, R. Brenn, J. Appl. Phys. 79 (1996) 1416.
4. M. Ohring, The Material Science of Thin Films, Academic Press, Boston.
5. W. Lu, K. Komvopoulos, J. Appl. Phys. 86 (1999) 2268.
6. W. Lu, K. Komvopoulos, Appl. Phys. Lett. 76 (2000) 3206.
7. P. Patsalas, S. Logothetidis, S. Kennou, C. Gravalidis, Thin Solid Films, (2003) in press.
8. Y. Lifshitz, G.D. Lempert, E. Grossman, Phys. Rev. Lett. 72 (1994) 2753.
9. J. Schwan, S. Ulrich, T. Theel, H. Roth, H. Ehrhardt, P. Becker, S.R.P. Silva, J. Appl. Phys. 82 (1997) 6024.
10. W. Lu, K. Komvopoulos, S.W. Yeh, J. Appl. Phys. 89 (2001) 2422.
11. D.J. Srolovitz, M.G. Goldiner, JOM (TMS) 47 (1995) 31.
12. M. Gioti, S. Logothetidis, C. Charitidis, Appl. Phys. Lett. 73 (1998) 184.
13. W. Lu, K. Komvopoulos, J. Appl. Phys. 85 (1999) 2642.
14. W. Lu, K. Komvopoulos, J. Tribol. 123 (2001) 641.
15. S. Logothetidis, C. Charitidis, Thin Solid Films 353 (1999) 208.
16. W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 (1992) 1564.
17. H. Schuster, H. Goebel, Adv. X-Ray Anal. 39 (1996) 1.
18. S. Logothetidis, C. Charitidis, P. Patsalas, Diam. Relat. Mater. 11 (2002) 1095.
19. P.S. Kisly, in: E.A. Almond, C.A. Brookes, R. Warren (Eds.), Proceedings of the International Conference on the Science of Hard Materials, 1984.
20. K.L. Johnson, Contact Mechanics. Cambridge University Press, Cambridge, UK.
21. P. Patsalas, S. Logothetidis, J. Appl. Phys. 88 (2000) 6346.
22. N.A. Hastas, C.A. Dimitriadis, P. Patsalas, Y. Panayiotatos, D.H. Tassis, S. Logothetidis, J. Appl. Phys. 89 (2001) 2832.
23. P.C. Kelires, M. Gioti, S. Logothetidis, Phys. Rev. B 59 (1999) 5074.
24. D. Wan, K. Komvopoulos, unpublished work.
25. SIEMENS Analytical X-ray Systems DiffracPlus/Profile, Instructions Manual, 1996.
26. JCPDS powder diffraction file 27-1402.
27. JCPDS powder diffraction files 29-1126, 29-1127.
28. W. Lu, K. Komvopoulos, unpublished work.
29. K.M. Yu, M.L. Cohen, E.E. Haller, W.L. Hansen, A.Y. Liu, I.C. Wu, Phys. Rev. B. 49 (1994) 5034.
30. L. Azaroff, The Powder Method, Wiley, New York.
31. S.R.P. Silva, G.A. Amaratunga, E.K. Salje, K.M. Knowles, J. Mater. Sci. 29 (1994) 4962.
32. S. Logothetidis, G. Stergioudis, Appl. Phys. Lett. 71 (1997) 2463.
33. M.F. Toney, S. Brennan, J. Appl. Phys. 66 (1989) 1861.
34. SIEMENS Analytical X-ray Systems, REFSIM-Instructions Manual, 1996.
35. R.M.A. Azzam, N. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
36. D.E. Aspnes, Thin Solid Films 89 (1982) 249.
37. S. Logothetidis, P. Patsalas, M. Gioti, A. Galdikas, L. Pranevicius, Thin Solid Films 376 (2000) 56.
38. F.L. Xiong, Y.Y. Wang, V. Leppert, R.P.H. Chang, J. Mater. Res. 8 (1993) 2265.
39. S. Logothetidis, J. Petalas, S. Ves, J. Appl. Phys. 79 (1996) 1040.
40. G.E. Jellison, F.A. Modine, Appl. Phys. Lett. 69 (1996) 2137.
41. J. Tauc, R. Grigorov, A. Vancu, Physica Status Solidi 15 (1966) 627.
42. F. Wooten, Optical Properties of Solids, Academic Press, New York, 1972.
43. M. Gioti, S. Logothetidis, P. Patsalas, A. Laskarakis, Y. Panayiotatos, V. Kechagias, Surf. Coat. Technol. 125 (2000) 289.
44. M. Gioti, D. Papadimitriou, S. Logothetidis, Diam. Relat. Mater. 9 (2000) 741.
45. A.B. Djurisic, E.H. Li, J. Appl. Phys. 85 (1999) 7404.
46. S. Logothetidis, J. Petalas, H.M. Polatoglou, D. Fuchs, Phys. Rev. B 46 (1992) 4483.
47. R. Lossy, D.L. Pappas, R.A. Roy, J.P. Doyle, J. Bruely, J. Appl. Phys. 77 (1995) 4750.
48. A.C. Ferrari, A. Libassi, B.K. Tanner, V. Stolojan, J. Yuan, L.M. Brown, S.E. Rodil, B. Kleinsorge, Robertson J. Phys. Rev. B 62 (2000) 11089.