Structural characterization of SiGe and SiGe:C heterostructures using a combination of X-ray scattering methods

Powder Diffraction

Volumn 19, Issue 1, 2004, Pages 49-52

  Woitok, J F ^a  

^a MALVERN INSTRUMENTS LTD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION PATTERNS; X-RAY DIFFUSE SCATTERING (XDS);

CHEMICAL VAPOR DEPOSITION; DENSITY (SPECIFIC GRAVITY); HETEROJUNCTIONS; LIGHT REFLECTION; MASS SPECTROMETRY; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS; X RAY SCATTERING;

SILICON COMPOUNDS;

EID: 1842509107     PISSN: 08857156     EISSN: 19457413     Source Type: Journal    
DOI: 10.1154/1.1649320     Document Type: Article

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