Stress relaxation and thermal evolution of film properties in amorphous carbon

Journal of Electronic Materials

Volumn 26, Issue 9, 1997, Pages 1021-1029

  Sullivan, J P ^a   Friedmann, T A ^a   Baca, A G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Amorphous carbon; Electrical conductivity; Stress relaxation; Thermal evolution

Indexed keywords

EID: 0001296350     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0239-9     Document Type: Article

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