Stress relaxation and stability in thick amorphous carbon films deposited in layer structure

Applied Physics Letters

Volumn 73, Issue 2, 1998, Pages 184-186

  Gioti, M ^a   Logothetidis, S ^a   Charitidis, C ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001136344     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121749     Document Type: Article

References (20)

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